Cros F., Allen M.G., Lang J.H.
Massachusetts Institute of Technology, US
Keywords: FDTD, magnetic diffusion, MEMS, saturation
As flux densities and frequencies are raised to increase the performance of magnetic micro-actuators, micro-motors/generators, and micro-inductors, eddy currents and magnetic saturation start to limit the performance of these devices. In this paper, we present a powerful numerical method based on a modified finite-difference time-domain (FDTD) simulation of Maxwell’s equations. This method successfully models both eddy currents and material saturation within a magnetic MEMS device. Experimental verification of the method is also presented.
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Published: February 23, 2003
Pages: 408 - 411
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-1-7