Wilson W.C., Atkinson G.M.
NASA Langley Research Center, US
Keywords: frequency domain, MEMS, modeling, surface acoustic wave
The lack of integrated design tools for MEMS devices in general, and for Surface Acoustic Wave (SAW) devices specifically, has led to the development of tools that will enable integrated design, modeling, simulation, analysis and automatic layout generation of SAW devices. First order models of SAW delay lines in the frequency domain have been developed using the Simulink® simulator. The model implements the Impulse Response method to calculate the frequency response, the radiation conductance, the acoustic susceptance, the complex impedance, and the insertion loss for the system.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Pages: 73 - 76
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 1-4200-6184-4