Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS)

Ostergaard D.F., Gyimesi M.
ANSYS, Inc., US

Keywords: coupled analysis, finite elements (FE), micro electromechanical systems (MEMS), reduced order modeling (ROM)

The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 684 - 687
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0