White J.K.
Massachusetts Institute of Technology, US
Keywords: Fast Solvers, Integral Equations
One difficulty associated with computer simulation of micromachined devices is that the devices are typically geometrically complicated and innately three-dimensional. For this reason, attempts to exploit existing finite-element based tools for micromachined device simulation has proved difficult. Instead, micromachine device designers have been early adopters of the recently developed accelerated boundary-element methods. In this short paper the author will describe a little of the history of these methods, primarily to point the interested reader to the relevant literature.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 1 - 3
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6