Environmental and Economic Assessment of Nano-Fabrication Processes of Memory Devices

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The unique mechanical, electronic, and non-volatility of carbon nanotubes (CNT) have significant potential to replace current silicon-based switches. However, before fully integrating CNT switches into the semiconductor industry, the production costs and environmental impacts associated with these nanomanufacturing processes must be comprehensively assessed. Life cycle analysis and process-based technical cost models are created to compare both these fabrication processes.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2008 Clean Technology Conference and Trade Show
Published: June 1, 2008
Pages: 376 - 379
Industry sectors: Advanced Materials & Manufacturing | Energy & Sustainability
Topics: Sustainable Materials
ISBN: 1-4200-8502-0