Mohamed N.M., Lai M.K., Begam K.M.
University Technology PETRONAS, MY
Keywords: aligned carbon nanotubes, chemical vapor deposition, piezoresistance
The paper reports on the investigation of using aligned carbon nanotubes (CNTs) as the pressure sensing element. Besides the unique advantages of high sensitivity, small size, low power consumption, and strong mechanical stability, the driving factor for developing CNTs-based pressure sensor is the thermal stability. Unlike the conventional Si-based pressure sensors which have maximum operating temperature of 120oC, CNT based pressure sensor can be operated up to 250oC. The sensor configuration was set up for testing in order to establish the working principle of the nanotube-based pressure sensor
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Published: June 21, 2010
Pages: 130 - 133
Industry sector: Advanced Materials & Manufacturing
Topic: Advanced Materials for Engineering Applications
ISBN: 978-1-4398-3402-2