Bettini L.G., Milani P., Piseri P.
University of Milano, IT
Keywords: carbon, cluster, micro-supercapacitor, thin film
Power generation and storage for microelectromechanical systems, miniaturized biomedical devices, sensors and integrated on-chip components, can significantly benefit from the fabrication and integration of planar thin film supercapacitors. Supersonic cluster beam deposition (SCBD) of nanostructured carbon (ns-C) is a versatile technique for the fabrication of porous carbon thin films. SCBD consists in a random stacking of low kinetic energy nanoparticles producing films with very low-density and high porosity. The use of supersonic expansions for carbon cluster deposition allows to obtain very high deposition rates and highly collimated beam (divergence
Journal: TechConnect Briefs
Volume: 2, Materials for Energy, Efficiency and Sustainability: TechConnect Briefs 2015
Published: June 14, 2015
Pages: 29 - 32
Industry sector: Energy & Sustainability
Topic: Energy Storage
ISBN: 978-1-4987-4728-8