Li F., Clark J.V.
Purdue University, US
Keywords: AFM, MEMS, self-calibratable, sensor, stiffness
To perform reliable scientific measurements with the atomic force microscope (AFM), it is important to calibrate the AFM cantilever. Conventional calibration methods have a 10 to 15% uncertainty, and the accuracies of such methods are unknown. These conventional techniques include the added weight method, the thermal vibration method, the layout geometry method, and the factory specification method. In this paper, we present a study on the proposed use of novel self-calibratable MEMS to calibrate AFM cantilever force, stiffness, and deflection. Our method uses self-calibratable MEMS with repeatable accuracy and quantifiable uncertainty. Our MEMS can be more easily fabricated in a simple 3-mask SOI process.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Published: June 13, 2011
Pages: 410 - 413
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4398-7139-3