Anomalous Thermomechanical Softening-Hardening Transitions in Micro-oscillators

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This work documents and explains a counter-intuitive nonlinear phenomenon, where the laser-detected resonant motion of forced, micromechanical oscillators can be tuned from softening to hardening by increasing the laser power incident on a prestressed silicon nitride oscillator. This tuning is explained by a thermo-mechanical model in which linear and nonlinear stiffness contributions have opposing responses to temperature change.

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Journal: TechConnect Briefs
Volume: 3, Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation – Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: June 1, 2008
Pages: 525 - 528
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topics: Informatics, Modeling & Simulation
ISBN: 978-1-4200-8505-1