Bart S.F., Swart N.R., Mariappan M., Zaman M.H., Gilbert J.R.
Microcosm Technologies, Inc., US
Keywords: CAD, ems, FEM, MEMS, MST
A comprehensive CAD software environment is presented for MEMS/MST design. It includes MEMS mechanical schematic entry, parameterized cell layout generation, automatic lumped parameter macro-model generation, and LVS style error checking. These tools allow for flexible design includino parameterized-cell layout generation. Lumped parameter macro-models can be generated automatically from 3-D, static, FEM/BEM based device simulations The software environment also provides error checking between different design views. The design environment is illustrated using a differential capacitive-based accelerometer as an example. Efficient, dynamic simulations of this large example system with models based on true ,-D device behavior are shown.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 386 - 391
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3