Holm J., Caplins B., Keller R.
National Institute of Standards and Technology, US
Keywords: Diffraction, electron microscopy, programmable, scanning, transmission
A new programmable detector for scanning transmission electron microscopy (p-STEM) is described. A digital micromirror array lies at the heart of the detector and serves as a programmable virtual objective aperture. Two sensors, a photomultiplier tube and a CMOS digital camera, are used to enable real-space transmission imaging and on-axis diffraction, respectively. Detector operation is demonstrated with several samples in a conventional scanning electron microscope (SEM).
Journal: TechConnect Briefs
Volume: TechConnect Briefs 2019
Published: June 17, 2019
Pages: 13 - 16
Industry sector: Advanced Materials & Manufacturing
Topics: Advanced Materials for Engineering Applications, Materials Characterization & Imaging
ISBN: 978-0-9988782-8-7