Zine-El-Abidine I., Okoniewski M., McRory J.G.
University of Calgary and TRLabs, CA
Keywords: inductor, MEMS, radio frequency, tunable
This paper reports a single-wafer micromachined radiofrequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5Ghz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: March 7, 2004
Pages: 340 - 342
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-7-6