Janicek V., Husak M., Formanek J., Jakovenko J.
FEE CTU in Prague, CZ
Keywords: electrostatic, energy harvesting, generator, MEMS
This paper discusses the design, optimization, simulation and fabrication of 3D electrostatic MEMS energy harvester. It is one part of self-powered microsystem. It is able to work in all 3 axis which increases the efficiency. The first modal frequency of 108 Hz is really low in comparison with occupied place (only about 16 sqmm). The structure can also be reconfigured to work as a 3D accelerometer.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: June 18, 2012
Pages: 118 - 121
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4665-6275-2