Regular Nano-Pores Fabricated By UV Cross-Linking Non-softbaked SU-8 Resist In a Solvent Evaporation Controlled Environment
This paper proposes a novel technology to fabricate 3D nano pore structures in SU-8 resist, a widely employed resist in MEMS and Bio-chips. Controlling the evaporation rate in SU-8 fabrication process, regular porous structures with [...]