Titanium Nitride – TechConnect Briefs

Synthesis and Characterization of Nanocrystalline Tin Powder by Reactive Milling

Lara J.O., Ramírez H.B., Instituto Politecnico Nacional, MX

TiN powder was obtained by reaction milling of a titanium powder in air. The Ti powder was milled in an attrition mill or a Spex mill. Characterization of the powders was carried out by means [...]

Three-Dimensional Simulation of Bulge Formation in Contact Hole Metalization

Pyka W., Selberherr S., Technical UniversityVienna, AT

During sputter deposition of metal layers bulges at sharp convex corners can arise and are observed after metalization of contact holes for semiconductor circuits. We present an explanation of this phenomenon by assuming that in [...]