Static and Dynamic Optical Metrology of Micro-Mirror Thermal Deformation
Forest C.R., Reynolds-Brown P., Blum Spahn O., Harris J., Novak E., Wong C.C., Mani S., Peter F., Adams D., Sandia National Laboratories, US
A two-position micro-optical switch is being developed at Sandia National Laboratories. This MEMS device is shown in Figure 1 as a gear with a through-hole; the actuation mechanism is not shown. In the "on" position, [...]