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HomeKeywordsthermal conductivity

Keywords: thermal conductivity

Nonequilibrium molecular dynamics simulation for size effects on thermal conductivity of silicon nanostructures

Liu X.J., Yang J.P., Yang Y-W, Yang J.P., Yang Y-W, Nanyang Technological University, SG
The thermal conductivity of silicon nanostructures was investigated using the Tersoff potential based Nonequilibrium molecular dynamics (NEMD) simulation approach. In such bond-order NEMD simulation model, the quality of the Tersoff potential for heat transport of [...]

Practical nanotechnology in Electronics

Hammer-Fritzinger D., NanoDynamics Inc., US
Nanotechnology has been hailed as the “next wave” to replace CMOS as the process of choice to make logic devices using technologies as diverse as carbon nanotube grids, polymer semiconductors and even “wetware” – ionic/electronic [...]

Phonon Scattering in Doped Silicon by Molecular Dynamics Simulation

Yao M., Watanabe T., Phillpot S.R., Schelling P.K., Keblinski P., Cahill D.G., University of Florida, US
Molecular dynamics simulation is used to study the scattering of phonon wave packets of well–defined frequency . The simulation system is 22 unit cells in the direction normal to phonon propagation and 3000 unit cells [...]

Effect of Thermophysical Property Variations on Surface Micromachined Polysilicon Beam Flexure Actuators

Atre A., Boedo S., Rochester Institute of Technology, US
Electrically heated, thermally driven, surface micromachined polysilicon beam flexure thermal actuators have been investigated using analytical methods that employ constant material properties either taken at room temperature or based on a set of averaged temperatures [...]

Adaption of the 3w-Method for Testing of MEMS

Raudzis C., Schatz F., Wharam D., Corporate Research, Robert Bosch GmbH, DE
Automated wafer level testing of MEMS requires methods to measure geometry and material related parameters by purely electrical means. The three omega method to measure the thermal conductivity seems to be appropriate for this task. [...]

Joule Heating Simulation of Poly-Silicon Thermal Micro-Actuators

Silversmith D.J., Reid J.R., Air Force Research Laboratory, US
Previous studies of surface micro-machined polycrystalline silicon MEMS thermal micro-actuators have shown that these simple devices can provide deflections on the order of 10 micrometers at CMOS compatible drive voltages. These thermo-mechanical devices operate by [...]

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