supersonic nozzle – TechConnect Briefs

Simultaneous removal of nano-sized contaminant particles with multi-modal size distribution using hybrid particle beams

The removal of contaminant particles(CPs) as small as 10nm from wafer surface is essential in successful fabrication of nano-scale devices. The supersonic particle beam technique using nano-sized volatile bullet particles(BPs) was extremely effective in removing [...]

Removal of 10-nm contaminant particles from a wafer surface with supersonic CO2 particle beam

Kim E-J, Kim I-H, Kim E-J, Kim I-H, Lee J.W., POSTECH, KR

Contaminant control is becoming a major issue of nano-scale devices. Cryogenic aerosol beam using micron-sized aerosol particles has long been successfully used to remove contaminant particles (CPs) down to 50nm, and supersonic particle beam using [...]

Cleaning 10nm ceramic particles by the supersonic particle beam

Kim I., Hwang K., Lee J.W., POSTECH, KR

Cryogenic aerosol beam using micron-sized aerosol particles has long been successfully used to remove contaminant particles down to 50nm, and supersonic particle beam using particles smaller than 100nm lowered the limit of cleaning down to [...]

Experiments on removing nano particles on a substrate using a supersonic particle beam

Lee J.W., Lee M.J., Lee J.W., Lee M.J., Yi M-Y, Pohang University of Science and Technology, KR

Cryogenic particle beam can be an effective means of removing nano-sized contaminant particles from a substrate surface. In order to generate a particle beam of high intensity and controlled size and temperature, Argon gas was [...]