Fabrication and analysis of MEMS test structures for residual stress measurement
Sharma A., Kaur M., Bansal D., Kumar D., Rangra K., Central Electronics Engineering Research Institute (CEERI/ CSIR), IN
A set of microstructures for in situ stress measurement is presented. It is based on lancet principle, with dedicated design for the amplification of the dimensional variations induced by the internal stress of the structural [...]