A New High Precision Procedure for AFM Probe Spring Constant Measurement using a Microfabricated Calibrated Reference Cantilever Array (CRCA)
A new technique for calibrating Atomic Force Microscope (AFM) cantilevers is demonstrated using a unique array of microfabricated reference cantilevers. The array, consisting of seven uniform rectangular cantilevers of different length (and thus stiffness), was [...]