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HomeKeywordsSputter Deposition

Keywords: Sputter Deposition

Self-assembled Alternating Nano-scaled Layers

Wu W-Y, Ting J-M, National Cheng Kung University, TW
This paper reports the use of a conventional sputter deposition technique to produce self-assembled alternating nano-scaled layers consisting of diamond-like carbon (DLC) and metal. A conventional sputter deposition technique produces alternating layers only when multiple [...]

Numerical Simulations of Sputter Deposition and Etching in Trenches Using the Level Set Technique

O'Sullivan P.L., Baumann F.H., Gilmer G.H., Bell Laboratories, Lucent Technologies, US
We have performed 2D and quasi-3D numerical simulations of physical vapor deposition (PVD) into high aspect ratio trenches used for modern VLSI interconnects. The topographic evolution is modeled using (continuum) level set methods. The level [...]

Three-Dimensional Simulation of Bulge Formation in Contact Hole Metalization

Pyka W., Selberherr S., Technical UniversityVienna, AT
During sputter deposition of metal layers bulges at sharp convex corners can arise and are observed after metalization of contact holes for semiconductor circuits. We present an explanation of this phenomenon by assuming that in [...]

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