Subsurface characterization of high dielectric nanostructures in low dielectric polymer matrix using Electric Force Microscopy and Scanning Electron Microscopy

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Scanning Probe Microscopy (SPM) and Scanning Electron Microscopy (SEM) are two powerful techniques for surface characterization of nanostructures. With the development of nanotechnology, there is a growing need to nondestructively characterize nanostructures at the subsurface [...]

Characterisation of Electrical Fields of Buried Interdigitated Nanoscale Ti-Electrode Arrays by a Novel Atomic Force Microscopy Measurement Procedure and Their Fabrication by FIB Milling

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The fabrication and characterisation of interdigitated titanium nanoelectrode arrays with 500nm and 50nm width and spacing is described in this work. The electrical-field above the fabricated 500nm electrodes can be sensed by means of a [...]