single crystal silicon – TechConnect Briefs

Local Oxidation Characteristics of Single Crystal Silicon

Ichida Y., Morimoto Y., Sato R., Saito N., Utsunomiya University, JP

Recently, the surface modification with an atomic force microscope (AFM) has attracted special interest as one of the surface processing techniques in a nanometer scale and investigated vigorously [1]. The nanometer-scale scratching (nanoscratching) that removes [...]

Nanomachining on Si (100) Surfaces Using an Atomic Force Microscope with Lateral Force Transducer

Ichida Y., Morimoto Y., Sato R., Murakami M., Utsunomiya University, JP

In recent years, the surface modification with an atomic force microscope (AFM) has attracted special interest as one of the surface processing techniques in a nanometer scale [1-3]. Particularly, this technique will play an increasingly [...]

Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk Drives

Jianqiang M., Shixin C., Yi L., Data Storage Institute, SG

The modeling and simulation of a single crystal silicon microactuator for high-density hard disk drives are described in this paper. The microactuator is fabricated by LISA process, which has an electrically isolated structure directly from [...]