reactive ion etching – TechConnect Briefs

Development of Methanol Based Reactive Ion Etching Processes for Nanoscale Magnetic Devices

Moneck M.T., Zhu J.-G., Carnegie Mellon University, US

Recent advances in the area of magnetoelectronics include the development of bit patterned media (BPM) for hard disk drives and the realization of spin transfer torque (STT) devices. As feature sizes shrink to sub-50 nm [...]

Fabrication of a Real-Time Reactive Ion Etching Resonant Sensor Using a Low Temperature Sacrificial Polymer

Morris B.G., Joseph P.J., May G.S, Georgia Institute of Technology, US

This paper presents a sacrificial layer process using a low temperature polymer as a sacrificial material for fabricating a surface micromachined in-situ reactive ion etching (RIE) resonant sensor. The sensor monitors film thickness and etch [...]

Design and Development of an Integrated MEMS Sensor for Real Time Control of Plasma Etching

Morris B.G., May G.S, Georgia Institute of Technology, US

This paper explores a novel technique for monitoring film thickness in reactive ion etching that incorporates a micromachined sensor. The prototype sensor correlates film thickness with the change in resonant frequency that occurs in the [...]