Piezoresistive – TechConnect Briefs

Monolithic CMOS MEMS technology development: A piezoresistive-sensors case study

Chaehoi A., Weiland D., O’Connell D., Bruckshaw S., Ray S., Begbie M., Institute for System Level Integration, UK

This paper presents the development of a monolithic CMOS-MEMS platform under the iDesign and SemeMEMS projects with the aim of jointly providing an open access “one-stop-shop” prototyping facility for integrated MEMS. This work addresses the [...]

Modeling and Simulation of New Structures for Sub-millimeter Solid-state Accelerometers with Piezoresistive Sensing Elements

Amarasinghe R., Dao D.V., Sugiyama S., Ritsumeikan University, JP

This paper presents design, fabrication and characterization of miniaturized one-axis single crystal solid-state accelerometers with Nanometer Stress Concentration Region (NSCR) on piezoresistive sensing elements utilizing MEMS bulk micromachining techniques and design, simulation of new sub-millimeter [...]

Soft Structured Piezoresistive Sensors by Inkjet Printing

Agrawal A., Patra P.K., Calvert P.D., University of Massachusetts Dartmouth, US

In this communication, we present a novel approach for the fabrication of soft structured polymeric strain sensors composed of, woven cotton base, and a conducing poly (3, 4 – ethylenedioxythiophene) - poly (4-styrenesulfonate) (PEDOT/PSS). A [...]

Nano-Cantilevers for an Ultra-Sensitive Bio-Assay

Zheng J., Klein K., Pucha R., Sitaraman S.K., Sitaraman S.V., Merlin D., Rajalakshmi S., Sarma D.S.R., Gerwirtz A., Sitaraman S.K., Sitaraman S.V., Georgia Institute of Technology, US

Micro and Nano-scale cantilever arrays are being developed for an ultra sensitive bio-assay (Figure 1). The advantage of these cantilevers is that they eliminate the use of laser for deflection detection, which is impractical for [...]

Micromachined Piezoresistive Tactile Sensor Array Fabricated by Bulk-etched MUMPs Process

Tuantranont A., Lomas T., Bright V.M., National Electronics and Computer Technology Center (NECTEC), TH

This paper discusses the design, fabrication and testing of a 5x5 micromachined tactile sensor array for the detection of an extremely small force (micrometer-Newton range). Central contacting pads that are trampoline-shape suspended structures and sensor [...]