piezo-resistivity – TechConnect Briefs

Investigation of the Piezoresistive Properties of Nano Structured Amorphous Carbon for Force Sensor Applications

Lüthje H., Biehl S., Bandorf R., Sick J.-H., Peiner E., Tibrewala A., Fraunhofer IST, DE

In this contribution we report on investigations of the nano structure, morphology and nano topography of amorphous carbon films with respect to the piezo resistive, electrical and mechanical properties. Therefore a-C, a-C:H and doped a-C:H:X [...]

Modeling of Stress Induced Hysteresis in Piezo-Resistive Analysis

Lien H-P, ISE, CH

The impact of mechanical stress on electrical characterizations of microelectronic circuitry is a major design issue in development of sensors and integrated micro-electro-mechanical systems. Because the electrical properties of semiconductors are in uenced by external [...]