Simulation and Fabrication of Large Area 3D Nanostructures
Bogart K.H.A., El-kady I., Grubbs R.K., Rahimian K., Sanchez A.M., Ellis A.R., Wiwi M., McCormick F.B., J.-L. Shir D., Rogers J.A., Sandia National Laboratories, US
Three-dimensional (3D) nano-structures are vital for emerging technologies such as photonics, sensors, fuel cells, catalyst supports, and data storage. The Proximity-field nanoPatterning1 method generates complex 3D nanostructures using a single exposure and development cycle. Exposure [...]