pattern – TechConnect Briefs

Milling Process Control with Dimensional Feedback on a Focused Ion Beam – Scanning Electron Microscope System (FIB-SEM)

Sanabia J.E., Raith USA, Inc., US

In nanofabrication and nanoanalysis, focused ion beam – scanning electron microscope (FIB-SEM) systems are increasingly used for demanding patterning tasks which rely on precise pattern placement and/or dimension control. Easily verifying and correcting for patterning [...]

Temperature and Stress Controlled Surface Manipulation in NiAl Nano-Layers

Sutrakar V.K., Roy Mahapatra D., Melnik R.V.N., Indian Institute of Science, IN

Quantum dot arrays with precisely controlled positions and sizes are desirable for making templates for micro-and nano-electronic devices. Numerous experimental works have shown that unguided self-assembled growth of quantum dots usually fails to realize perfectly [...]