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Keywords: ohmic

Nano-contacts and Nano-interconnects

Monty G., Underwriters Laboratories, and IEC TC113, US
This oral paper is the result of nearly 3 years of review and analysis of the state-of-the art of nano-contacts and nano-interconnects. An analysis of over 80 technical articles was performed, including interviews with some [...]

Interdigitated Low-Loss Ohmic RF-MEMS Switches

Gaddi R., Bellei M., Gnudi A., Margesin B., Giacomozzi F., ARCES - University of Bologna, IT
An interdigitated design for MEMS RF-switches is applied to both a shunt and a series ohmic contact configuration. Interdigitated Al-Ti-TiN RF-signal paths and poly actuation electrodes are arranged underneath an electrodeposited gold plate, suspended by [...]

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