nonlinear micromachined flexure – TechConnect Briefs

Nonlinear Micromachined Flexure for Stiction Reduction

Shim D-H, Cho J-W, Samsung Advanced Institute of Technology, KR

This paper reports the nonlinear micromachined flexure to reduce the stiction in MicroElectroMechanical Systems (MEMS). Good electrical contacts are essential in the applications like MEMS switches or relays. In this case high contact forces are [...]