mixed-level modeling – TechConnect Briefs

Compact Models for Squeeze-Film Damping in the Slip Flow Regime

Sattler R., Wachutka G., Technical Univeristy of Münich, DE

We propose a mixed-level simulation scheme for squeeze film damping effects in microdevices, which makes it possible to include damping effects in system-level models of entire microsystems in a natural, physically-based and flexible way. Our [...]

Mixed-Level Model for Highly Perforated Torsional Actuators Coupling the Mechanical, the Electrostatic and the Fluidic Domain

Sattler R., Schrag G., Wachutka G., Institute for Physics of Electrotechnology, DE

Electrostatic attraction between neighboring electrodes is a widely used actuation principle employed in tiltable micromirrors or microrelays. Electrostatic actuation is especially favored for switching applications in mobile telecommunication because of its low power consumption. State-of-the-art [...]

Mixed-Level Model for Highly Perforated Torsional Actuators Coupling the Mechanical, the Electrostatic and the Fluidic Domain

Sattler R., Schrag G., Wachutka G., Institute for Physics of Electrotechnology, DE

Electrostatic attraction between neighboring electrodes is a widely used actuation principle employed in tiltable micromirrors or microrelays. Electrostatic actuation is especially favored for switching applications in mobile telecommunication because of its low power consumption. State-of-the-art [...]

Physically-Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators

Sattler R., Schrag G., Wachutka G., Münich University of Technology, DE

We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which enables the inclusion of damping effects in system level models of entire microsystems in a natural, physical-based, and flexible [...]