microelectromechanical systems – TechConnect Briefs

Near-Infrared Laser Actuated Cantilevers with Wavelength-Dependent Response

Lucas T.M., James K.T., Beharic J., Moiseeva E.V., Keynton R.S., O’Toole M.G., Harnett C.K., University of Louisville, US

Development of microscale actuating technologies has been critical for interacting with natural components at the cellular level. Small-scale actuators and switches have potential in areas such as microscale pumping and particle manipulation. Thermal actuation has [...]

Nanomaterials-Enabled Photonic and Chemiresistive Sensing of Chemicals and Biochemicals

Choi C-J, Benkstein K.D., Rogers P.H., Montgomery C.B., Semancik S., National Institute of Standards and Technology, US

Contact events occurring between target species and surface sites on sensing materials initiate front-end interactions and subsequent transduction processes that can yield viable signals for target detection. By offering high surface-to-volume ratios, and specialized properties, [...]

Measuring the layer thickness of MEMS using torsional resonance

Andrews N.D., Clark J.V., Purdue University, US

In this work we propose a method to measure the structural layer thickness of MEMS using torsional resonance. The thickness of structures often has measurable influences on the mechanical, thermal, and electrical behaviors. Measurement of [...]

Nano-gap high quality factor thin film SOI MEM resonators

Grogg D., Tekin C.H., Badila-Ciressan D.N., Tsamados D., Mazza M., Ionescu M.A., Ecole Polytechnique Fédérale de Lausanne, CH

A 1.25 m thin SOI micro-electro-mechanical (MEM) resonator with a quality factor of 100’000 at 24.6 MHz is demonstrated. A nanogap fabrication process allows the fabrication of < 200 nm gaps, allowing for low polarization [...]

Contact Force Models, including Electric Contact Deformation, for Electrostatically Actuated, Cantilever-Style, RF MEMS Switches

Coutu_Jr. R.A., Kladitis P.E., Air Force Institute of Technology, US

Electrostatically actuated, cantilever-style, metal contact, radio frequency (RF), microelectromechanical systems (MEMS) switches depend on having adequate contact force to achieve desired, low contact resistance. In this study, contact force equations that account for beam tip [...]

GEMS: A Revolutionary System for Environmental Monitoring

Manobianco D.M., Manobianco J., Evans R.J., Pister K.S.J., Manobianco D.M., Manobianco J., ENSCO, Inc., US

This paper describes a revolutionary, new observing system designed for environmental monitoring that will integrate MicroElectroMechanicalSystems (MEMS) and nanotechnologies. The concept, known as Global Environmental MEMS Sensors (GEMS), features an integrated system of airborne probes [...]

NanoMuscle at the Nano-Frontier

Nash H., MacGregor R., Von Behrens P., Szilagyi A., NanoMuscle, US

Nano scale structures: Much excitement has been generated in recent years by nano-science breakthroughs. A common characteristic of such developments has been the discovery of novel properties of materials of common composition but with characteristic [...]

Systematic Design and Optimization of Multi-Material, Multi-Degree-of-Freedom Micro Actuators

Sigmund O., Technical University of Denmark, DK

The paper reports an automated method for the synthesis of multi-material, multi-degree-of-freedom micro actuators. The method is based on topology optimization, an iterative computational scheme consisting of alternating finite element analyses, sensitivity analyses and optimal [...]

Systematic Design of Electrothermomechanical Microactuators using Topology Optimization

Sigmund O., Technical University of Denmark, DK

Design methods for MicroElectroMechanical Svstems (MEMS) have, until now, typically been based on intuition, experience and triai and error approaches. A method which may be used to design mechanical and electromechanical coupling parts of MEMS [...]

Microelectromechanical Systems (MEMS) Design and Design Automation Research Projects at Duke University

Dewey A., Fair R.B., Duke University, US

This paper presents an overview of microelectromechanical systems (MEMS) research being conducted at Duke University. The Duke University MEMS research program encompasses initiatives in both application design and design automation. These two areas serve synergistic [...]