Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications
Loughlin J.P., Fettig R.K., Moseley S.H., Kutyrev A.S., Mott D.B., NASA/Goddard Space Flight Center, US
Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5mm silicon nitride micro-shutter for use in a space-based Multi-object Spectrometer (MOS). The micro-shutter uses a torsion hinge to go [...]