micro electromechanical systems (MEMS)

On the Utility of Airborne MEMS for Improving Meteorological Analysis and Forecasting

Manobianco J., Short D.A., ENSCO, Inc., JP

Among the applications envisioned for Micro ElectroMechanical Systems (MEMS) sensors are weather observations from probes that are suspended in the atmosphere and carried by wind currents. This paper describes preliminary experiments with a state-of-the-science numerical [...]

Quality Based Design and Design for Reliability of Micro Electro Mechanical Systems (MEMS) Using Probabilistic Methods

Reh S., Lethbridge P., Ostergaard D.F., ANSYS, Inc., US

The paper demonstrates the use of probabilistic methods to assess the electromechanical behavior of micro electromechanical systems (MEMS) under the presence of micromachining manufacturing and process uncertainties. Probabilistic Methods are used to assess uncertainties involved [...]

Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS)

Ostergaard D.F., Gyimesi M., ANSYS, Inc., US

The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program.

Co-simulation and Optimization Micro Electro Mechanical Systems by Using Method of Theoretical Investigation

Mkrttchian V., State Engineering University of Armenia, AM

Before elaboration and designing of micro electromechanical systems (MEMS) it is very important to carry out an appropriate computer modeling for analyzing and optimizing. To describe adequately the physical phenomenon talking place in MEMS it [...]