MEMS – Page 12 – TechConnect Briefs

Advantages and Limitations of Diamond-Like Carbon as a MEMS Thin Film Material

Ohlckers P., Skotheim T., Dmitriev V., Kirpilenko G., Vestfold University College, NO

We can observe from the material properties of Diamond-Like Carbon (DNC) several characteristics can be favourable exploited to make MEMS devices with DNC thin films: Extraordinary yield strength, extraordinary stiffness, high indentation hardness and wear [...]

Investigating the Benefit-Cost of MEMS Application for Structural Health Monitoring of Transportation Infrastructure

Jha M.K., Davy A.B., Morgan State University, US

This paper develops a fuzzy-logic based procedure for quantitative cost and benefit calculation of MEMS application for structural health monitoring of transportation infrastructure. This will be a major step forward for widespread MEMS application in [...]

Active Coatings Technologies for Customized Military Coating Systems

Zunino III J.L., U.S. Army ARDEC, US

The main objective of the U.S. Army’s Active Coatings Technologies Program is to develop technologies that can be used in combination to tailor coatings for utilization on Army Materiel. The Active Coatings Technologies Program, ACT, [...]

MEMS Reliability Assessment Program – Progress to Date

Zunino III J.L., Skelton D.R., U.S. Army ARDEC, US

Micro-electromechanical systems (MEMS) are a technology that the Army and DOD rely on heavily to achieve their objectives. The MEMS devices within these systems will be required to last the lifetime of the weapon systems [...]

Analysis of an Ink Ejection Failure on a MEMS Micro-Injector Printing Head

Lee I.Y., Hsu T-P, Tseng F-C, Tang H-K, Lin G-D, BenQ Corporation, TW

In this paper, a stress model is proposed and this model well explains the stress induced failure mechanism of this MEMS micro-injector. An effective solution and optimize design to enhance the robustness of ink chamber [...]

In-plane Vibration Measurements of Micro Scale Devices Using Sub-Pixel Image Registration Algorithms and Stroboscopic Illumination

Buyukyazi T., Basdogan I., Koc university, TR

Rapid developments in micro devices created a necessity for reliable testing methods for characterization. There are several methods for vibration measurements but most of them use out-of-plane displacements. However, in most cases in-plane measurements are [...]

Mechanical Properties of Polycrystalline 3C-SiC Heteroepitaxial Layers

Pozzi M., Harris A.J., Burdess J.S., Lee K.K., Cheung R., Newcastle University, UK

Silicon carbide (SiC) is widely recognised as the leading candidate to replace silicon in Micro Electro-Mechanical Systems (MEMS) devices operating in harsh environments. The superiority of SiC over Si as regards mechanical, chemical and electronic [...]

Micromechanical GaAs Thermal Convertor for Gas Sensors

Jakovenko J., Lalinsky T., Drzík M., Vanko G., Czech Technical University in Prague, Faculty of Electrical Engineering, CZ

This paper discusses design, simulation and fabrication of new Micromechanical Thermal Converters (MTCs) based on GaAs developed for Gas sensors. GaAs MTCs seem to be very attractive for design of thermally based MEMS sensor devices. [...]

Global MEMS Equipment and Materials Markets and Opportunities

Sheet L., SEMI, US

The global MEMS market is experiencing strong growth, driven by consumer applications, MEMS-CMOS integration, automotive applications and emerging MEMS device markets. MEMS manufacturing technology and materials are critical to the continued growth in this market. [...]

A study on the novel micromixer with chaotic flow

Lee S-H., Kang H.J., Choi B.K., Sogang University, KR

We design that a fluid was rotated by a coupling between Lorentz force and a moving force of a electric charge in an electric field. And it generate barrier embedded chaotic flow to use mass [...]