Memcad – TechConnect Briefs

The Design and Simulation of a Novel Out-of-plane Micro Electrostatic Actuator

Tsou C., Huang S.L., Lai T.S., Li H.C., Feng Chia University, TW

This paper presents a mechanism of developing a novel out-of-plane micro electrostatic actuator capable of causing large out-of-plane deflection. The proposed actuation mechanism is using the attraction force between the charged bodies to bend the [...]

Thermal Management of Micro-Hotplates using MEMCAD as Simulation Tool

Briand D., Grétillat M.-A., van der Schoot B., de Rooij N.F., Institute of Microtechnology, CH

In this paper we report on the electrothermal simulations performed in the aim of optimising the power consumption and the temperature distribution of micro-hotplates for gas sensing applications. The micro-hotplate designs were optimised using the [...]

Accurate Lumped-Parameter modeling for Dynamic Simulation of Electrostatic MEMS Actuators

Pal Chaudhury S., Winick D., Franzon P., North Carolina State University, US

This paper introduces a novel approach of accurately modeling electrostatically actuated MEMS structures, using a lumped parameter electrical analogy based on voltage controlled de.es in Spice. This analysis takes into account the changes in capacitive [...]