lumped parameter model – TechConnect Briefs

Low Order Squeeze Film Model for Simulation of MEMS Devices

Vemuri S., Fedder G.K., Mukherjee T., Carnegie Mellon Universtiy, US

A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity [...]

MEMS Component Extraction

Baidya B., Gupta S.K., Mukherjee T., Carnegie Mellon University, US

Surface micromachined structures are composed of atomic elements like anchors, beams and fingers, which can be further grouped into components like springs, comb drives and plates. Automatic recognition of these elements and com-ponents is crucial [...]