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HomeKeywordslinear response

Keywords: linear response

Effect of Nonlinear Structural Stiffness on the Response of Capacitive MEMS Devices

Shavezipur M., Nieva P., Khajepour A., Hashemi S.M., University of Waterloo, CA
In this paper, a design technique is presented that can linearize the response of MEMS capacitive elements such as tunable capacitors, capacitive sensors and out-of-plane electrostatic actuators. The method combinations the electrode flexibility and nonlinear [...]

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