lift-off – TechConnect Briefs

Micro-Tip Assembled Metal Cantilevers with Bi-Directional Controlability

Kwon H., Nakada M., Hirabayashi Y., Higo A., Ataka M., Fujita H., Toshiyoshi H., KAST, JP

High density data storage systems utilizing the atomic force microscopy have been developed for a next-generation storage technology. We have reported new fabrication methods of micro tips with contact shadow mask process formed on a [...]

Fabrication of High Quality PZT Thick Film Using Lift-Off Technique

Zhao H.J., Ren T.L., Liu J.S., Liu L.T., Liu J.S., Liu L.T., Li Z.J., Liu J.S., Liu L.T., Institute of Microelectronics, Tsinghua University, CN

Lead-zirconate-titanate (PZT) is a typical ferroelectrical material with outstanding properties. The demand for the thickness of PZT films used in MEMS is usually over 1_m due to the advantages of the thick thin films, so [...]