level-set – TechConnect Briefs

MEMS Fabrication Modeling with ChISELS: A Massively Parallel 3-D Level-Set Based Feature Scale Modeler

Musson L.C., Plimpton S.J., Schmidt R.C., Sandia National Laboratories, US

We are developing ChISELS (Chemically Induced Surface Evolution with Level-Sets), a parallel code to model 3-D material depositions and etches at feature scales on patterned wafers at low pressures. ChISELS is a platform on which [...]

Modeling and Simulation for Epitaxial Growth with Strain

Caflisch R.E., Connell C., Luo E., Gyure M., Simms G., Vvedensky D., UCLA, US

We describe a new approach to simulation of epitaxial growth with strain. An island dynamics model with a level set numerical method is used for the growth, a lattice statics model is used for the [...]

Modeling of Surface Tension in Fluidic MEMS Using the Level-Set Method

Takahashi K., Kyushu University, JP

Mixed state of liquid and gas is frequently seen in fluidic MEMS, for example, ink jet printer, heat exchanger, thermo-capillary optical switch, and so on. The surface tension is the most dominant mechanical effect in [...]

The Level-Set Method for Modeling Epitaxial Growth

Ratsch C., Petersen M., Caflisch R.E., University of California, Los Angeles, US

A level-set model for the simulation of epitaxial growth is described. In this model, the motion of island boundaries of discrete atomic layers is determined by the time evolution of a continuous level-set funciton psi. [...]

The Level-Set Method for Modeling Epitaxial Growth

Ratsch C., Petersen M., Caflisch R.E., University of California, Los Angeles, US

A level-set model for the simulation of epitaxial growth is described. In this model, the motion of island boundaries of discrete atomic layers is determined by the time evolution of a continuous level-set funciton psi. [...]