flash – TechConnect Briefs

Multi-Bit/Cell SONOS Flash Memory with Recessed Channel Structure

Han K-R, Kwon H-I, Lee J-H., Kyungpook National University, KR

A novel device structure for 4-bit/cell with recessed channel structure is presented and characterized for NOR-type nonvolatile memory (NVM) technology. In this paper, we studied a 4-bit/cell SONOS flash memory cell Since two transistors in [...]

Step and Flash Imprint Lithography Using UV-transparent, Electrically Conductive Templates

Hooper A., Talin A.A., Dauksher W.J., Baker J.H., Convey D., Eschriech T., Resnick D.J., Bailey T.C., Johnson S., Willson C.G., Motorola Labs, US

Step and flash imprint lithography (SFIL) is a promising new technique capable of resolving sub 100nm features at a substantially lower cost than any other candidate method currently under development. Successful implementation of SFIL requires [...]