finite element analysis FEA – TechConnect Briefs

Leveraging Mainstream Design and Analysis Tools for MEMS

Mirman I., Flanders D.C., SolidWorks Corporation, US

After several decades spent largely in the research domain, MEMS-based products are finally being commercialized at a furious pace. These products can require extensive mechanical design and analysis capabilities, including: -3D construction and visualization; -material [...]

Design of Piezoresistive Silicon Cantilevers with Stress Concentration Regions (SCR) for Scanning Probe Microscopy (SPM) Applications

Gupta A., Bashir R., Neudeck G.W., McElfresh M., Purdue University, US

This paper describes and evaluates the incorporation of novel Stress Concentration Region (SCR) in silicon based cantilevers to enhance piezoresistive displacement, force, and torque sensitivities. In brief, SCR is a region, on the cantilever, with [...]

Electro-Mechanical Transducer for MEMS Analysis in ANSYS

Gyimesi M., Ostergaard D., ANSYS, Inc., US

The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.