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Coupled Substrate-resonator-electrostatic Simulation and Validation fo High-Q MEMS Resonator Performance

Park K.C., Park Y.H., Park K.C., Park Y.H., University of Colorado at Boulder, US

Vibration energy transmission from MEMS resonator through anchor to substrate, viz., anchor loss, is examined by utilizing the coupled substrate-resonator-electrostatic numerical model. The resonator is electrostatically excited beam-type structure anchored at both ends onto multi-layered [...]