electrostatic actuator – TechConnect Briefs

Non-contact biaxial nanoprobe utilized for surface measurements of MEMS

Goj B., Dressler L., Hoffmann M., Ilmenau University of Technology, DE

In this work an oscillating biaxial nanoprobe will be presented which measures the surface of a measurement object. The biaxial nanoprobe vibrates in two directions to realize scanning measurements and to overcome the challenges of [...]

Optimal Design of an Electrostatic Zipper Actuator

Brenner M.P., Lang J.H., Li J., Slocum A.H., Harvard University, US

We describe a method for predicting the optimal design of an electrostatic zipper actuator. The shape of the zipping beam and the electrode are optimized to maximize the applied force at a given stroke, while [...]

Actuation for Probe-Based Mass Data Storage

Alfaro J.F., Fedder G.K., Carnegie Mellon University, US

This paper describes the development of a micro media actuator (MMA) for probe-based mass data storage. The process is based on dry etching and incorporates a thinned silicon media sled to increase the frequency response [...]