dynamic response – TechConnect Briefs

Modelling of Torsional Micromirrors with Springs made of Multiple Rotational Serpentine Elements

You J., Packirisamy M., Stiharu I., Concordia University, CA

In general, this paper presents the deduced analytical model and numerical simulation of electrostatically actuated torsional micromirrors with two symmetrical side springs of multiple rotational serpentine elements. Modelling of these kinds of micromirrors is carried [...]

The Dynamic Performance of a Micro-machined Coriolis Flow Meter

Clark C., Wang S., Cheesewright R., Brunel University, UK

The dynamic performance of micro-machined Coriolis flow meters Summary The performance of a prototype MEMS mass-flow meter developed by ISSYS was investigated using the Brunel University Virtual Coriolis Meter facility. The flow meter comprises a vacuum sealed [...]