Dry release process – TechConnect Briefs

A Novel Method for Determining Optimum Etch Times for the One Step Dry Release Proces

Docker P.T., Kinnell P.K., Ward M.C., The University of Birmingham, UK

This paper details a novel method for determining the optimum etch times for releasing structures when using the authors one step dry release process. By using self releasing structures known as waffles the exact point [...]