cross-section – TechConnect Briefs

A visual approach on MEMS process modeling using device cross-sections

Schmidt T., Mielke M., Hahn K., Ortloff D., Popp J., Brueck R., University of Siegen, DE

With MEMS entering fast moving consumer markets the need for more efficient design concepts becomes apparent. A technology centered approach where a product is designed around a highly specialized and optimized technology cannot cope with [...]

Strain Driven Growth of Zinc Oxide Nanowires on Sapphire: Controlling Horizontal vs. Standing Growth

Nikoobakht B., Eustis S., National Institute of Standards and Technology, US

Recently we showed large scale fabrication of field-effect transistors from horizontal ZnO nanowires (NWs) on a-plane sapphire. We are interested in understanding the factors that induce the unique growth direction of horizontal ZnO NWs and [...]

A 2D Visualization Tool for SUMMiT V Designs

Yarberry V.R., Jorgensen C.R., Sandia National Laboratories, US

This paper describes the 2D Process Visualizer, a CAD tool that enables a SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to visualize the results of applying the process sequence to a mask set by [...]