CMOS MEMS accelerometer – TechConnect Briefs

Layout Synthesis of CMOS MEMS Accelerometers

Gupta V., Mukherjee T., Carnegie Mellon University, US

An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parame-trized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped [...]