cantilever – TechConnect Briefs

A novel co-resonantly coupled cantilever sensor platform

Koerner J., University of Utah, US

Dynamic cantilever sensors are used for many different applications, for example in material’s research to study magnetic properties of small particles and thin films, in biology for real-time observation of cell processes and as balances [...]

Optimized Surface Patterning Tools for Sub-attoliter Volume Fluid Deposition

Adams M.L., University of South Alabama, US

Micromachined cantilever-based surface patterning tools were optimized to allow submicron diameter printing of fluids on various surfaces. A detailed fluidics model was used to analyze critical variables and determine the best method for optimization. Tools [...]

Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy

Sulzbach T., Engl W., Maier R., Nanoworld Services GmbH, DE

Cantilever arrays probes with self-sensing and self-actuating cantilevers and integrated sharp silicon tips for parallel surface scanning were realized. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an [...]

Development of Surface-micromachined Binary Logic Gate for Low Frequncy Signal Processing in MEMS based Sensor Applications

Chakraborty S., Bhattacharyya T.K., Indian Institute of Technology (IIT), Kharagpur, IN

This paper presents in brief the design, analysis and fabrication of surface micro-machined cantilever based binary logic inverter and universal gate for low frequency signal processing circuits in MEMS based sensors. The paper attempts to [...]

Deposition of beta-SiC thin films on Si (100) substrates by MOCVD method for NSOM applications

Nam S-H, Kim M.H., Hyun J.S., Boo J.-H., Sungkyunkwan University, KR

Silicon carbide thin films were deposited on Si(100) substrates by metal-organic chemical vapor deposition(MOCVD) in high vacuum condition(2.010-7 Torr) using 1,3-disilabutane as a single source precursor which contains silicon and carbide in 1:1 ratio at [...]

Micro-Tip Assembled Metal Cantilevers with Bi-Directional Controlability

Kwon H., Nakada M., Hirabayashi Y., Higo A., Ataka M., Fujita H., Toshiyoshi H., KAST, JP

High density data storage systems utilizing the atomic force microscopy have been developed for a next-generation storage technology. We have reported new fabrication methods of micro tips with contact shadow mask process formed on a [...]

Feasibility Study of Cochlear-like Acoustic Sensor using PMN-PT Single Crystal Cantilever Array

Hur S., Lee S.Q., Kim W.D., Korea Institute of Machnery & Materials, KR

The mammalian cochlea is an organ that performs the conversion of the incoming mechanical energy into electrical signals in the auditory nerve fibers. Current cochlear Implants have been developed in an effort to restore sensorineural [...]

A New High Precision Procedure for AFM Probe Spring Constant Measurement using a Microfabricated Calibrated Reference Cantilever Array (CRCA)

Reitsma M.G., Gates R.S., National Institute of Standards and Technology, US

A new technique for calibrating Atomic Force Microscope (AFM) cantilevers is demonstrated using a unique array of microfabricated reference cantilevers. The array, consisting of seven uniform rectangular cantilevers of different length (and thus stiffness), was [...]

New reference standards and artifacts for nanoscale property characterization

Pratt J.R., Kramar J.A., Shaw G., Gates R., Rice P., Moreland J., National Institute of Standards and Technology, US

This paper provides an overview of calibration artifacts being developed at NIST that will greatly aid the accurate determination of nanoscale physical properties across a broad range of applications. We focus on three proposed reference [...]

Mechanical Nonlinear Generation with Coupled Torsional Harmonic Cantilevers for Sensitive and Quantitative Atomic Force Microscopy Imaging of Material Characteristics

Sahin O., Quate C.F., Solgaard O., Stanford University, US

Tapping-mode atomic force microscopy has been the most widely used mode of operation. Due to non-linear tip-sample forces, dynamics of the cantilever motion is an extremely rich problem. Recent studies have shown that higher harmonics [...]