canonical representation – TechConnect Briefs

Challenges in CMOS-MEMS Extraction

Baidya B., Mukherjee T., Carnegie Mellon University, US

CMOS micromachining processes are being increasingly used to fabricate integrated MEMS devices. Verification of such designs requires extraction from layout to mixed domain circuits and MEMS schematics for lumped parameter simulation. The higher etch hole [...]

MEMS Component Extraction

Baidya B., Gupta S.K., Mukherjee T., Carnegie Mellon University, US

Surface micromachined structures are composed of atomic elements like anchors, beams and fingers, which can be further grouped into components like springs, comb drives and plates. Automatic recognition of these elements and com-ponents is crucial [...]